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Numerische Berechnung des Spannungsverlaufs und der Bias-Spannungen in Plasmareaktoren mit HF-Entladungen
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Catalogue Record 37503
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Catalogue Record 37503
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Author
Deutsch,
R
.
Erz, U.
Herold, H.
Corporate Author
Stuttgart Univ. (DE). Inst. fuer Plasmaforschung
TITLE
Numerische Berechnung des Spannungsverlaufs und der Bias-Spannungen in Plasmareaktoren mit HF-Entladungen
Publ. Year
1989
Pages
61 S.
Figures
63 Abb.
Report No.
IPF-89-1
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Catalogue Record 37503
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50047790
ZB: R 6807
Zentralbibliothek
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