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Depth Distributions of Low Energy Deuterium Implanted into Silicon as Determined by SIMS
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Catalogue Record 48564
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Catalogue Record 48564
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Author
Magee, C.W.
Cohen, S.A.
Voss, E.
Corporate Author
Princeton Univ., NJ(US). Plasma Physics Lab.
TITLE
Depth Distributions
of
Low Energy Deuterium Implanted into Silicon as Determined by SIMS
Publ. Year
1979
Pages
13 S.
Report No.
PPPL-1575
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Catalogue Record 48564
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Catalogue Record 48564
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Catalogue Information 48564
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50060631
ZB: P 24315
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