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Depth Distributions of Low Energy Deuterium Implanted into Silicon as Determined by SIMS

Catalogue Information
Field name Details
Author Magee, C.W.
Cohen, S.A.
Voss, E.
Corporate Author Princeton Univ., NJ(US). Plasma Physics Lab.
TITLE Depth Distributions of Low Energy Deuterium Implanted into Silicon as Determined by SIMS
Publ. Year 1979
Pages 13 S.
Report No. PPPL-1575
Catalogue Information 48564 Beginning of record . Catalogue Information 48564 Top of page .
Item Information
Barcode Shelf Location Volume Ref. Branch Status
50060631 ZB: P 24315
  Zentralbibliothek . Available .
. Catalogue Record 48564 ItemInfo Beginning of record . Catalogue Record 48564 ItemInfo Top of page .