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The Effect of Target Texture on Spatial Distribution of Sputtered Material
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Catalogue Record 53832
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Catalogue Information
Catalogue Record 53832
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Author
Zhukova, Yu.N.
Mashkova, E.S.
Molchanov, V.A.
Editor
Eisert, J. (Uebers. )
Original Title
Vliyanie tekstury misheni na prostranstvennoe raspredelnie raspylennogo veshchestva
TITLE
The Effect of Target Texture on Spatial Distribution of Sputtered Material
Publ. Year
1992
Pages
S. 19-23
Series
Poverkhnost
Volume
No. 12
Annotation
Russ., Engl.
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Catalogue Record 53832
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Catalogue Record 53832
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Catalogue Record 53832
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Catalogue Information 53832
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50066421
ZB: R 11223
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Catalogue Record 53832
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