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An Evaluated Data Base for Sputtering
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Catalogue Record 67475
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Catalogue Record 67475
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Author
Thomas, E.W.
Janev, R.K.
Botero, J.
Corporate Author
International Atomic Energy Agency, Vienna(AT). International Nuclear Data Committee
TITLE
An Evaluated Data Base for Sputtering
Publ. Year
1993
Pages
31 S.
Figures
16 Figs.
Report No.
INDC(NDS)-287
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Catalogue Record 67475
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Catalogue Information 67475
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50081096
ZB: R 15391
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