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Use of RF Bias in LAPPS (Large Area Plasma Processing System)
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Catalogue Record 75657
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Catalogue Record 75657
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Author
Manheimer, Wallace M.
Lampe, Martin
Fernsler, Richard F.
Corporate Author
Naval Research Lab. (NRL), Washington,D.C.(US)
TITLE
Use of RF Bias in LAPPS (Large Area Plasma Processing System)
Publ. Year
2000
Pages
18 S.
Figures
3 Figs.
Report No.
NRL-MR-6707-99-8451
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Catalogue Record 75657
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Catalogue Record 75657
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Catalogue Record 75657
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Catalogue Information 75657
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51000466
ZB: R 17082
Zentralbibliothek
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