1 |
|
A Gas Flow Uniformity Study in Large-Area Showerhead Reactors for RF Plasma Deposition [Report]
|
Sansonnens, L.
|
1999 |
|
Regalstandort: ZB: R 16694.
Anzahl Exemplare: 1.
|
2 |
|
Anionic Clusters in Dusty Hydrocarbon and Silane Plasmas [Report]
|
Hollenstein, C.
|
1995 |
|
Regalstandort: ZB: R 13881.
Anzahl Exemplare: 1.
|
3 |
|
Broadband Magnetic and Density Fluctuations in the TCA Tokamak [Report]
|
Hollenstein, C.
|
1986 |
|
Regalstandort: ZB: R 2611.
Anzahl Exemplare: 1.
|
4 |
|
Characterisation and Origin of Arc Fluctuations in a F4 DC Plasma Torch Used for Thermal Spraying [Report]
|
Dorier, J.L.
|
1999 |
|
Regalstandort: ZB: R 16779.
Anzahl Exemplare: 1.
|
5 |
|
Characterisation of Fluctuations in a DC Plasma Torch Used for Thermal Spraying [Report]
|
Dorier, J.L.
|
1999 |
|
Regalstandort: ZB: R 16573.
Anzahl Exemplare: 1.
|
6 |
|
Characterizing Hydrogenated Microcristalline Silicon Films by Spectroscopic Ellipsometry [Report]
|
Nosenko, V.
|
1998 |
|
Regalstandort: ZB: R 14613.
Anzahl Exemplare: 1.
|
7 |
|
Charge Screening in the High Voltage, Capacitive rf Sheath [Report]
|
Mueller, H.
|
2000 |
|
Regalstandort: ZB: R 17063.
Anzahl Exemplare: 1.
|
8 |
|
Degree of Dissociation Measured by FTIR Absorption Spectroscopy Applied to VHF Silane Plasmas [Report]
|
Sansonnens, L.
|
1997 |
|
Regalstandort: ZB: R 14404.
Anzahl Exemplare: 1.
|
9 |
|
Diagnostics of Particle Genesis and Growth in RF Silane Plasmas by Ion Mass Spectrometry and Light Scattering [Report]
|
Hollenstein, C.
|
1993 |
|
Regalstandort: ZB: R 11604.
Anzahl Exemplare: 1.
|
10 |
|
Direct Visual Observation of Powder Dynamics in RF Plasma-Assisted Deposition [Report]
|
Howling, A. A.
|
1991 |
|
Regalstandort: ZB: R 8650.
Anzahl Exemplare: 1.
|
11 |
|
Evaluation of SiC-Coated Carbon Limiters in the TCA Tokamak [Report]
|
Hofmann, F.
|
1985 |
|
Regalstandort: ZB: R 0626.
Anzahl Exemplare: 1.
|
12 |
|
Frequency Effects in Silane Plasmas for PECVD [Report]
|
Howling, A. A.
|
1991 |
|
Regalstandort: ZB: R 9240.
Anzahl Exemplare: 1.
|
13 |
|
Ion Acoustic Turbulence in a Large-Volume Plasma [Report]
|
Kawai, Y.
|
1977 |
|
Regalstandort: ZB: P 20716.
Anzahl Exemplare: 1.
|
14 |
|
Limiter Design and Material Tests in TCA with Alfven Wave Heating [Report]
|
Hofmann, F.
|
1985 |
|
Regalstandort: ZB: P 32242.
Anzahl Exemplare: 1.
|
15 |
|
Measurement of Ion Acoustic Test Waves in a Magnetized Plasma by Means of a 30 Ghz Lecher Wire Interferometer of High Spatial Resolution [Report]
|
PARIS P J
|
1977 |
|
Regalstandort: ZB: P 20075.
Anzahl Exemplare: 1.
|
16 |
|
Measurements of Dispersion Relation in Ion Beam-Plasma System [Report]
|
Kawai, Y.
|
1977 |
|
Regalstandort: ZB: P 21390.
Anzahl Exemplare: 1.
|
17 |
|
Negative Ion Mass Spectra and Particulate Formation in RF Silane Plasma Deposition Experiments [Report]
|
Howling, A. A.
|
1992 |
|
Regalstandort: ZB: R 10809.
Anzahl Exemplare: 1.
|
18 |
|
Nonlinear Mode Coupling and Saturation of Decay Instability in Ion Beam - Plasma System [Report]
|
Honzawa, T.
|
1979 |
|
Regalstandort: ZB: P 23986.
Anzahl Exemplare: 1.
|
19 |
|
Nonlinear-Modulation of Ion Beam Mode [Report]
|
Honzawa, T.
|
1980 |
|
Regalstandort: ZB: P 26560.
Anzahl Exemplare: 1.
|
20 |
|
Oxygen Diluted Hexamethyldisiloxane Plasmas Investigated by Means of In Situ Infrared Absorption Spectroscopy and Mass Spectrometry [Report]
|
Magni, D.
|
2000 |
|
Regalstandort: ZB: R 17319.
Anzahl Exemplare: 1.
|