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MAB

A Simple Method to Produce Quasi-Simultaneous Multiple Energy Helium Implantation
Tag Description
029mr
100 Paszti, F.
104aFried, M.
108aManuaba, A.
200 Hungarian Academy of Sciences, Budapest(HU). Central Research Inst. for Physics
331 A Simple Method to Produce Quasi-Simultaneous Multiple Energy Helium Implantation
425 1982
433 12 S.
540 ISBN 963 371 982 8
556 KFKI-1982-91